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"00:01:46 ¸ê®Æ = RAW values ( 'Z9.01','FG','90','SZ001.1','GL01',SYSDATE,'N','0.1','0.1' , '-0.0129','0.006','-0.0119','0.0305','-0.0047','-0.0066','-0.0158','0.0007', '-0.0233','-0.0057','-0.0124','0.0057','-0.0113','0.0174','0.0005','-0.0122', '-0.0136','-0.0074','-0.016','0.0003','0.0025','-0.0143','0.0031','0.0121', '0.0161','-0.0222','0.0013','-0.0118','0.0004','-0.0116','-0.0055','0.0155', '-0.0076','0.0391','0.0001','0.0117','-0.012','0.0159','-0.0137','0.0085')
"00:01:47 EQS send GLData_V5 to DS. [RvMsg]: [primPrcdId]Z9.01 [lotId]SZ001.1 [GLAutoRecipeId]V90_20 [GLEqpId]GL01 [stage]FG [parentNo]0 [intraTranslationX]-0.001 [intraTranslationY]0.000 [intraMagnification]-0.038 [intraRotation]0.035 [interRotation]0.042 [interOrthogonality]-0.020 [interExpansionX]-0.130 [interExpansionY]-0.256 [interTranslationX]-0.009 [interTranslationY]0.004 [asymrotation]-0.760 [asymmagnification]-0.134 [FlagSet]-00068+00036+00000+01000
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·Qn±NÀÉ®×importÂà´«¦¨¤U¦C®æ¦¡"00:01:46 0.1 0.1 -0.0129 0.006 -0.0119 0.0305 -0.0047 -0.0066 -0.0158 0.0007 -0.0233 -0.0057 -0.0124 0.0057 -0.0113 0.0174 0.0005 -0.0122 -0.0136 -0.0074 -0.016 0.0003 0.0025 -0.0143 0.0031 0.0121 0.0161 -0.0222 0.0013 -0.0118 0.0004 -0.0116 -0.0055 0.0155 -0.0076 0.0391 0.0001 0.0117 -0.012 0.0159 -0.0137 0.0085
"00:01:47 -0.001 0 -0.038 0.035 0.042 -0.02 -0.13 -0.256 -0.009 0.004 -0.76 -0.134 968 |
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